200mm DPS
ADAPTER,GV,LOWER CHAMBER,DPS MEC
US$1,750.0
CHAMBER BODY ASP+
US$4,000.0
COVER BACK CHAMBER COOLING DPS MEC
US$250.0
COVER FRONT CHAMBER COOLING DPS MEC
US$250.0
H.O.T PACK FILTER ONLY 386.5NM
US$600.0
H.O.T PACK FILTER ONLY 483.5NM
US$600.0
Insert Gas Feed Lower (DPS Poly)
US$150.0
INTERCONNECT BD H2O VDSII
US$50.0
LID, TOP, ASP
US$400.0
Narrow Hoop
US$450.0