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HEATER PRODUCER CERAMIC HEATER(0010-03840)
0040-31844 WBL-055 BELLOWS LIFT PIN KSM
0040-42414 TOP COOLING PLATE
0010-36941 MATCH AMAT AUTO BIAS H.E. MATCH 200MM
0200-35287 INSULATOR BASE CATHODE DPS MEC DPS CERAMIC BASE
0021-01421 DPS METAL UPPER CHAMBER
0190-09597 APPLICATOR BODY ASP
0040-48594 ESC PECVD HDP ESC 300MM 0012CE594C0-01
0100-76050 PCB ASSY CENTURA I CONTROLLER I/O BOARD 大背板
0040-02609 LINER CATHODE MAGNET SUPER-E
0100-76061 PCB SYSTEM ELECTRONIC BACKPLANE
0200-18093 SIDE NOZZLE
0200-05112 NOZZLE ALN 2.28L X 014DIA 100 % FLOW
0010-30686 RF MATCH
0010-06121 EDTCU NEW AMAT PART
<CMP> ASSY,OXIDE,SENSOR,8"
<PVD> ASSY, WAFER LIFT COOLDOWN/PASSTHRU
<PVD> HOOP LIFT 8” WELDMENT
<RTP> CH, ENP, FAST COOLDOWN
<RTP> LID, FAST COOLDOWN, ENP
200mm DPS (ASP CHAMBER lift assembly to air cylinder)
200mm DPS (DPS Etcher EDTCU/DTCU Hoist)
CENTURA (ASSY, SENSOR, WAFER PRESENT/WAFER SLIDE)
CENTURA (ASSY, SENSOR, WAFER SLIDE RECEIVER)
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