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＞Spare Parts ( Lam Research )
＞Spare Parts ( Lam Research )
810-017083-001 LAM PCB RF ESC FILTER BOARD
810-482740-001 LOADLOCK PUMP INTERFACE ACE BOARD
810-370540-002 PCB ASSY CONNECTOR BRKOUT A6
810-034818-001 PCB EMO DISPLAY ASSY
810-017021-001 PCB LIFTER FILTER LAM
660-239861-004 3156312-163 AE LAM RF TCP GENERATOR 8"
660-239861-003 3156312-162 AE LAM RF BIAS GENERATOR 8"
660-015516-014 3156011-006 TOP RF GENERATOR
685-097950-001 POWER SUPPLY ASTEX INVETER MODULE
730-06163-00 UPS
715-031986-008 CHAMBER WALL LOWER CHAMBER WALL 94 DFM
810-017082-004 PCB 16 CHANNEL HEATER CONTROL
OLD 625A-14059 NEW 625D-30518 796-019591-003 MKS MANOMETER 10TORR
660-098076-002 POWER SUPPLY OMEGA MG3-7CCDDEEF-1F
810-17031-4 PCB ASSY ADIO A0
810-800256-004 LAM PCB NOD BOARD
LAM 12" ESC (839-019090-374),30085724
INSUL ELCTD LWR ESC (716-441523-001)
718-094523-281 ESC LAM RESEARCH NOTCHED ESC 8"
715-073073-003 ESC BASEPLATE COOLING ESC
716-330004-181 FOCUS RING FLAT TO NOTCH
31502411-005 AE PINNACLE III DC POWER SUPPLY 1.5K
605-017016-100 PCB STEPPER MOTOR DRIVE CHIP
ADIO BOARD PCB ASSY(810-017050-004)
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