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＞Spare Parts (Applied Materials (AMAT) )
＞Spare Parts (Applied Materials (AMAT) )
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0100-20011 PCB ASSY CHAMBER A/B INTERCONNECT BOARD
0660-01647 332134 IGC PCB CARD ION GAUAGE MODULE BOARD
0100-20016 PCB ASSY PNEUMATIC 3-WAY INTERCONNECT BOARD
0100-20000 PCB 64 CHANNEL MUX BOARD ASSY
0100-00388 PCB ASSEMBLY VIDEO/SERIAL INTERFACE
0100-35107 PCB GAS PANEL DISTRIBUTION ASSY
0100-35263 PCB AC DISTRBUTION PCB
0100-38083 PCB CHAMBER INTERCOMECT BOARD A.C
0100-20055 PCB BLOW VALVE INTERCONNECT BD
0010-13663 ISOLATOR PHASE MAG FI80209導波管1
0200-06600 300MM RTP QUARTZ
OTF SENSOR,BANNER對照光電發射器 (SM31ELMHS-40380)(0010-76765)
1410-01031 HTR CARTRIDGE 750W 240V
0190-35096 0812SA19 WATER FLOW SW 5.50 GPM
0190-35252 ASSY CHAMBER PNEUMATICS RTP CENTURA 僅含底座
0015-35035 HEAT SINK PIN FINS
0190-35742 UHP159-31W2B-X/7792 OVER-PRESSURE SWITCH 2PSI (BOTTOM PURGE)
0200-03486 PIN LOCKING CHAMBER LOWER LINER 200MM & 300MM EPI
0200-35019 QUARTZ INJECT INSERT
0200-00207 TIP SUSCEPTOR SHAFT OUTSIDE
0200-00135 BLADE QUARTZ 200MM HP/HP+ WRIST ANTI-S
0010-37250 WRIST ASSY EHP-CR ROBOT
3870-02323 VALVE PNEU INLINE 1" NW25 VIT-SEAL
0100-00396 PCB ANALOG I/O BOARD
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